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High-Reflective Coatings For Ground and Space Based Applications
Type:
Journal
Info:
ICSO 2014
Date:
2014-10-07
Author Information
| Name | Institution |
|---|---|
| M. Schürmann | Fraunhofer Institute for Applied Optics and Precision Engineering |
| S. Schwinde | Fraunhofer Institute for Applied Optics and Precision Engineering |
| P. J. Jobst | Fraunhofer Institute for Applied Optics and Precision Engineering |
| O. Stenzel | Fraunhofer Institute for Applied Optics and Precision Engineering |
| S. Wilbrandt | Fraunhofer Institute for Applied Optics and Precision Engineering |
| Adriana Szeghalmi | Friedrich-Schiller-Universität Jena |
| Astrid Bingel | Fraunhofer Institute for Applied Optics and Precision Engineering |
| Peter Munzert | Fraunhofer Institute for Applied Optics and Precision Engineering |
| Norbert Kaiser | Fraunhofer Institute for Applied Optics and Precision Engineering |
Films
Plasma Al2O3
Plasma SiO2
Film/Plasma Properties
Characteristic: Reflectance Spectra
Analysis: Optical Reflectivity
Characteristic: Transmittance
Analysis: Optical Transmission
Characteristic: Damage, Defects
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Damage, Defects
Analysis: Optical Microscopy
Characteristic: Refractive Index
Analysis: -
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Film Stress
Analysis: Wafer Curvature
Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Substrates
| Ag |
Notes
| 456 |