Publication Information

Title: High-Reflective Coatings For Ground and Space Based Applications

Type: Journal

Info: ICSO 2014

Date: 2014-10-07

DOI: http://congrexprojects.com/Custom/ICSO/2014/Papers/1.%20Tuesday%207%20October/Session%203B%20Filters-%20Coatings%20-%20Gratings/2.68333_Schuermann.pdf

Author Information

Name

Institution

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Friedrich-Schiller-Universität Jena

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Films

Deposition Temperature Range N/A

75-24-1

7782-44-7

Deposition Temperature Range N/A

15112-89-7

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Reflectance Spectra

Optical Reflectivity

PerkinElmer lambda 950 Spectrophotometer

Transmittance

Optical Transmission

PerkinElmer lambda 950 Spectrophotometer

Damage, Defects

SEM, Scanning Electron Microscopy

Zeiss Sigma

Damage, Defects

Optical Microscopy

Leica CTR 6000

Refractive Index

Unknown

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Unknown

Density

XRR, X-Ray Reflectivity

Unknown

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

Zeiss Sigma

Film Stress

Wafer Curvature

Tencor

Chemical Composition, Impurities

FTIR, Fourier Transform InfraRed spectroscopy

Varian 3100 FTIR

Substrates

Ag

Keywords

Optical

Notes

456

Disclaimer

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