Publication Information

Title: Plasma-Modified Atomic Layer Deposition

Type: Conference Proceedings

Info: 68th Annual Gaseous Electronics Conference

Date: 2015-10-13

DOI: http://meetings.aps.org/link/BAPS.2015.GEC.GT1.165

Author Information

Name

Institution

U.S. Naval Research Laboratory

U.S. Naval Research Laboratory

Films

Other ZnO using Beneq TFS-200

Deposition Temperature Range N/A

Other V2O5 using Beneq TFS-200

Deposition Temperature Range N/A

Other HfO2 using Beneq TFS-200

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Unknown

Unknown

Plasmon Resonances

Unknown

Unknown

Electron Paramagnetic Resonance

Unknown

Unknown

Optical Dispersion

Unknown

Unknown

Mobility

Unknown

Unknown

Carrier Concentration

Unknown

Unknown

Resistivity, Sheet Resistance

Unknown

Unknown

Substrates

Keywords

Notes

520

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com