Electrically Excited Plasmonic Nanoruler for Biomolecule Detection

Type:
Journal
Info:
Nano Lett., 2016, 16 (9), pp 5728-5736
Date:
2016-08-22

Author Information

Name Institution
André DatheLeibniz Institute of Photonic Technology
Mario ZieglerLeibniz Institute of Photonic Technology
Uwe HübnerLeibniz Institute of Photonic Technology
Wolfgang FritzscheLeibniz Institute of Photonic Technology
Ondrej StranikLeibniz Institute of Photonic Technology

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Substrates

Silicon
Photoresist

Notes

857