Publication Information

Title: TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition

Type: Journal

Info: Electrochemical and Solid-State Letters, 11 2 H19-H21 2008

Date: 2007-11-26

DOI: http://dx.doi.org/10.1149/1.2813881

Author Information

Name

Institution

Korea Advanced Institute of Science and Technology

Korea Advanced Institute of Science and Technology

Korea Advanced Institute of Science and Technology

Korea Advanced Institute of Science and Technology

Films

Plasma TiO2 using Unknown

Deposition Temperature = 250C

546-68-9

7782-44-7

Plasma Al2O3 using Unknown

Deposition Temperature = 250C

75-24-1

7782-44-7

Plasma Ir using Unknown

Deposition Temperature Range N/A

0-0-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Dielectric Constant, Permittivity

CV, Cyclic Voltammetry

Keithley 590 CV Analyzer

EOT, Equivalent Oxide Thickness

CV, Cyclic Voltammetry

Keithley 590 CV Analyzer

Leakage Current

I-V, Current-Voltage Measurements

HP 4145B Semiconductor Parameter Analyzer

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Unknown

Thickness

Unknown

Unknown

Substrates

Ir

Silicon

Keywords

Al2O3

Amorphous State

Atomic Layer Deposition

Capacitors

DRAM chips

High-k Dielectric Thin Films

Leakage Currents

Nanostructured Materials

Permittivity

Plasma Deposition

Semiconductor Materials

Titanium Compounds

Notes

RTA on some TiO2-Al2O3 films.

32

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com