Publication Information

Title: Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates

Type: Journal

Info: J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015

Date: 2014-10-31

DOI: http://dx.doi.org/10.1116/1.4901459

Author Information

Name

Institution

University of Colorado, Boulder

Films

Thermal Al2O3 using Custom Rotary

Deposition Temperature = 180C

75-24-1

7732-18-5

Thermal W using Custom Rotary

Deposition Temperature = 120C

1590-87-0

7783-82-6

Plasma Pt using Custom Rotary

Deposition Temperature = 150C

94442-22-5

1333-74-0

Thermal Al2O3 using Custom

Deposition Temperature = 120C

75-24-1

7732-18-5

Thermal W using Custom

Deposition Temperature = 120C

1590-87-0

7783-82-6

Plasma Pt using Custom

Deposition Temperature = 120C

94442-22-5

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

224

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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