Publication Information

Title: Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN

Type: Conference Proceedings

Info: IEEE J. Electron Dev. Soc., Vol. 59, No. 10, May 2014, pp. 2662

Date: 2014-05-19

DOI: http://gaasmantech.com/Digests/2014/papers/049.pdf

Author Information

Name

Institution

University of Alberta

University of Alberta

University of Alberta

University of Alberta

University of Alberta

Films

Deposition Temperature = 250C

75-24-1

7727-37-9

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Unknown

I-V, Current-Voltage Measurements

Unknown

Unknown

C-V, Capacitance-Voltage Measurements

Unknown

Substrates

GaN

Keywords

Notes

363

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com