Publication Information

Title: Atomic layer deposited Al2O3 and parylene C dual-layer encapsulation for biomedical implantable devices

Type: Conference Proceedings

Info: 2013 Transducers & Eurosensors XXVII: The 17th International Conference on 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)

Date: 2013-06-13

DOI: http://dx.doi.org/10.1109/Transducers.2013.6626949

Author Information

Name

Institution

University of Utah

University of Utah

University of Utah

University of Utah

Films

Deposition Temperature = 120C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam VASE

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Unknown

Diffusion Barrier Properties

I-V, Current-Voltage Measurements

Unknown

Diffusion Barrier Properties

EIS, Electrochemical Impedance Spectroscopy

Unknown

Substrates

Au

Keywords

Encapsulation

Notes

565

Disclaimer

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