Strongly Disordered TiN and NbTiN s-Wave Superconductors Probed by Microwave Electrodynamics

Type:
Journal
Info:
Phys. Rev. Lett. 109, 107003, 2012
Date:
2012-05-08

Author Information

Name Institution
E. F. C. DriessenDelft University of Technology
P. C. J. J. CoumouDelft University of Technology
R. R. TrompDelft University of Technology
P. J. de VisserDelft University of Technology
T. M. KlapwijkDelft University of Technology

Films

Plasma TiN


Film/Plasma Properties

Characteristic: Thickness
Analysis: Profilometry

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: AFM, Atomic Force Microscopy

Characteristic: Resistivity, Sheet Resistance
Analysis: -

Characteristic: Carrier Concentration
Analysis: Hall Measurements

Characteristic: Superconductivity
Analysis: -

Substrates

SiO2
Silicon

Notes

668