The Effects of an O2 Plasma on the Optical Properties of Atomic Layer Deposited ZnO

Type:
Journal
Info:
ECS Transactions, 45 (7) 87-95 (2012)
Date:
2012-05-08

Author Information

Name Institution
Matthew A. ThomasUniversity of Arkansas at Little Rock
J.B. CuiUniversity of Arkansas at Little Rock

Films

Plasma ZnO


Other ZnO


Thermal ZnO


Film/Plasma Properties

Characteristic: Optical Properties
Analysis: Optical Transmission

Characteristic: Optical Properties
Analysis: Optical Absorption

Characteristic: Near Band Emission (NBE)
Analysis: PL, PhotoLuminescence

Characteristic: Photoluminescence
Analysis: PL, PhotoLuminescence

Characteristic: Photoluminescence
Analysis: Low Temperature Photoluminescence

Substrates

Glass
Si(100)

Notes

Ultratech Fiji PEALD and hybrid thermal/plasma ALD ZnO film development.
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