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Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition
Type:
Journal
Info:
Journal of Applied Physics 114, 173511 (2013)
Date:
2013-10-21
Author Information
| Name | Institution |
|---|---|
| Hyunsoo Jung | Hanyang University |
| Hagyoung Choi | Hanyang University |
| Heeyoung Jeon | Hanyang University |
| Sanghun Lee | Hanyang University |
| Hyeongtag Jeon | Hanyang University |
Films
Film/Plasma Properties
Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Compositional Depth Profiling
Analysis: AES, Auger Electron Spectroscopy
Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Plasma Species
Analysis: FHM, Floating Harmonic Method
Substrates
| PES, Poly(Ether Sulfone) |
Notes
| 575 |