Plasma-enhanced atomic-layer-deposited MoOx emitters for silicon heterojunction solar cells
Type:
Journal
Info:
Applied Physics A 2015, Volume 120, Issue 3, pp 811-816
Date:
2015-06-05
Author Information
Name | Institution |
---|---|
Johannes Ziegler | Martin Luther University |
Mathias Mews | Helmholtz-Zentrum Berlin für Materialien und Energie GmbH |
Kai Kaufmann | Fraunhofer Center for Silicon Photovoltaics CSP |
Thomas Schneider | Martin Luther University |
Alexander N. Sprafke | Martin Luther University |
Lars Korte | Helmholtz-Zentrum Berlin für Materialien und Energie GmbH |
Ralf B. Wehrspohn | Martin Luther University |
Films
Plasma MoOx
Plasma MoOx
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Minority Carrier Lifetime
Analysis: Photoconductance
Characteristic: Electrical Properties
Analysis: Bright I-V
Substrates
Silicon |
Notes
376 |