Electrodynamic response and local tunneling spectroscopy of strongly disordered superconducting TiN films

Type:
Journal
Info:
Phys. Rev. B 88, 180505, 2013
Date:
2013-10-10

Author Information

Name Institution
P. C. J. J. CoumouDelft University of Technology
E. F. C. DriessenCEA - INAC
J. BuenoSRON National Institute for Space Research
C. ChapelierCEA - INAC
T. M. KlapwijkDelft University of Technology

Films

Plasma TiN


Film/Plasma Properties

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Resistivity, Sheet Resistance
Analysis: Hall Bar Structures

Characteristic: Superconductivity
Analysis: -

Substrates

Si(100)

Notes

Paper available as chapter 6 in on-line thesis.
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