Publication Information

Title: Characteristics of Al2O3 Thin Films Deposited Using Dimethylaluminum Isopropoxide and Trimethylaluminum Precursors by the Plasma-Enhanced Atomic-Layer Deposition Method

Type: Journal

Info: Journal of the Korean Physical Society, Vol. 48, No. 1, January 2006, pp. 131~136

Date: 2006-01-01

DOI: http://www.kps.or.kr/jkps/abstract_view.asp?articleuid=3E5B5A04-31C7-4284-BF19-8218BE2A8A3F&globalmenu=3&localmenu=10

Author Information

Name

Institution

Hanyang University

Hanyang University

Hanyang University

Hanyang University

Pusan National University

Hanyang University

Films

Deposition Temperature Range = 150-300C

75-24-1

7782-44-7

Deposition Temperature Range = 110-300C

6063-89-4

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

TEM, Transmission Electron Microscope

Unknown

Thickness

Ellipsometry

Unknown

Bonding States

XPS, X-ray Photoelectron Spectroscopy

Unknown

Capacitance

C-V, Capacitance-Voltage Measurements

Keithley 590 CV Analyzer

Capacitance

C-V, Capacitance-Voltage Measurements

HP 4155A Semiconductor Parameter Analyzer

Leakage Current

I-V, Current-Voltage Measurements

Keithley 590 CV Analyzer

Leakage Current

I-V, Current-Voltage Measurements

HP 4155A Semiconductor Parameter Analyzer

Substrates

Silicon

Keywords

Plasma-Enhanced Atomic Layer Deposition

TMA

DMAI

Al2O3

Gate Dielectric

Notes

Rapid thermal anneal

Forming gas anneal

Substrates pirahna and HF cleaned

4

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com