Publication Information

Title: Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices

Type: Conference Proceedings

Info: 2014 GaAs ManTech Conference

Date: 2014-05-19

DOI: http://gaasmantech.com/Digests/2014/abstracts/51S-Selective%20Deposition%20of%20Low%20Temperature%20AlN%20Ohmic%20Contacts%20for%20GaN%20Devices.pdf

Author Information

Name

Institution

University of Alberta

University of Alberta

University of Alberta

University of Alberta

University of Alberta

University of Alberta

University of Alberta

Films

Deposition Temperature = 250C

75-24-1

7727-37-9

Deposition Temperature = 100C

19756-04-8

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Resistivity, Sheet Resistance

Unknown

Unknown

Unknown

C-V, Capacitance-Voltage Measurements

Unknown

Substrates

GaN

AlN

Keywords

Notes

563

Disclaimer

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