Publication Information

Title: Experimental verification of electro-refractive phase modulation in graphene

Type: Journal

Info: Scientific Reports 5, Article number: 10967 (2015)

Date: 2015-05-12

DOI: http://dx.doi.org/10.1038/srep10967

Author Information

Name

Institution

Applied Micro and Optoelectronic (AMO) GmbH

Applied Micro and Optoelectronic (AMO) GmbH

Applied Micro and Optoelectronic (AMO) GmbH

Applied Micro and Optoelectronic (AMO) GmbH

Applied Micro and Optoelectronic (AMO) GmbH

Applied Micro and Optoelectronic (AMO) GmbH

Applied Micro and Optoelectronic (AMO) GmbH

Applied Micro and Optoelectronic (AMO) GmbH

Films

Plasma Al2O3 using Unknown

Deposition Temperature = 300C

75-24-1

7782-44-7

Thermal Al2O3 using Unknown

Deposition Temperature = 150C

75-24-1

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

HSQ, Hydrogen SilsesQuioxane

Keywords

Notes

Plasma and thermal ALD Al2O3 films used in graphene-based electro-refractive phase modulation device.

330

Disclaimer

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