Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition

Type:
Journal
Info:
Phys. Rev. Lett. 16, 135-139, 2017
Date:
2016-12-12

Author Information

Name Institution
Mei ShenUniversity of Alberta
Amir AfsharUniversity of Alberta
Ying Yin TsuiUniversity of Alberta
Kenneth C. CadienUniversity of Alberta
Douglas W. BarlageUniversity of Alberta

Films

Plasma ZnO


Thermal ZnO


Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: I-V Plots
Analysis: I-V, Current-Voltage Measurements

Substrates

Cu

Notes

Some information from the paper is included in section 5.2 of the on-line thesis Schottky Nanodiodes Based on Zinc Oxide Thin Films.
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