Method of Fabrication for Encapsulated Polarizing Resonant Gratings

Type:
Journal
Info:
IEEE Photonics Technology Letters, Volume:25, Issue:15, 2013
Date:
2013-06-12

Author Information

Name Institution
A. J. PungClemson University
S. R. CarlClemson University
I. R. SrimathiClemson University
E. G. JohnsonClemson University

Films

Plasma Al2O3


Film/Plasma Properties

Substrates

SiO2

Notes

572