Publication Information

Title: A Capacitance-to-Frequency Converter with On-Chip Passivated Microelectrodes for Bacteria Detection in Saline Buffers up to 575 MHz

Type: Journal

Info: IEEE Transactions on Circuits and Systems II:Express Briefs, (Volume:PP, Issue:99)

Date: 2014-11-10

DOI: http://dx.doi.org/10.1109/TCSII.2014.2369111

Author Information

Name

Institution

Universite catholique de Louvain (UCL)

Universite catholique de Louvain (UCL)

Universite catholique de Louvain (UCL)

Universite catholique de Louvain (UCL)

Universite catholique de Louvain (UCL)

Films

Deposition Temperature = 25C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Al

Keywords

Diffusion Barrier

Corrosion

Notes

Ultratech Fiji PEALD Al2O3 for bacteria detection device electrode corrosion prevention.

151

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com