Publication Information

Title: Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum

Type: Journal

Info: Chem. Mater., 2012, 24 (10), pp 1752-1761

Date: 2012-04-17

DOI: http://dx.doi.org/10.1021/cm203812v

Author Information

Name

Institution

Eindhoven University of Technology

Eindhoven University of Technology

University of Colorado, Boulder

Eindhoven University of Technology

Films

Plasma Pt using Custom

Deposition Temperature Range N/A

94442-22-5

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam M-2000U

Substrates

Keywords

Notes

Strong Pt ALD literature review.

Paper exists as chapter 3 in thesis downloadable at http://alexandria.tue.nl/extra2/754694.pdf

113

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