Publication Information

Title: Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film

Type: Journal

Info: ECS Transactions, 25 (4) 39-47 (2009)

Date: 2009-10-04

DOI: http://dx.doi.org/10.1149/1.3205041

Author Information

Name

Institution

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Eindhoven University of Technology

Films

Plasma CoOx using Custom

Deposition Temperature Range = 100-400C

1277-43-6

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

RBS, Rutherford Backscattering Spectrometry

Unknown

Density

RBS, Rutherford Backscattering Spectrometry

Unknown

Resistivity, Sheet Resistance

Four-point Probe

Signatone

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

FTIR, Fourier Transform InfraRed spectroscopy

Bruker Optics Tensor 27

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

NT-MDT Solver P47SPM

Gas Phase Species

QMS, Quadrupole Mass Spectrometer

Unknown

Thickness

Ellipsometry

J.A. Woollam M-2000U

Refractive Index

Ellipsometry

J.A. Woollam M-2000U

Thickness

Ellipsometry

J.A. Woollam M-2000D

Refractive Index

Ellipsometry

J.A. Woollam M-2000D

Thickness

XRR, X-Ray Reflectivity

Bruker D8 Advance

Density

XRR, X-Ray Reflectivity

Bruker D8 Advance

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Philips X'Pert MPD Diffactometer

Substrates

Si with native oxide

SiO2

Keywords

Electrochromic

Smart Windows

Thin Film Solar Cell

Catalysts

Sensors

Notes

42

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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