Title: Electronic and optical device applications of hollow cathode plasma assisted atomic layer deposition based GaN thin films
Info: J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015
Resistivity, Sheet Resistance
SEM, Scanning Electron Microscopy
TFT, Thin Film Transistor
Hollow-cathode plasma source.
Ultratech Fiji PEALD GaN study with various annealing and photodetector results.
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