Publication Information

Title: Fabrication of AlN/BN bishell hollow nanofibers by electrospinning and atomic layer deposition

Type: Journal

Info: APL MATERIALS 2, 096109 (2014)

Date: 2014-08-26

DOI: http://dx.doi.org/10.1063/1.4894782

Author Information

Name

Institution

Bilkent University

Bilkent University

Bilkent University

Bilkent University

Bilkent University

Bilkent University

Films

Deposition Temperature = 100C

75-24-1

7727-37-9

1333-74-0

Deposition Temperature = 450C

97-94-9

7727-37-9

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Images

SEM, Scanning Electron Microscopy

FEI Quanta 200 FEG

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

FEI Quanta 200 FEG

Thickness

TEM, Transmission Electron Microscope

FEI Tecnai G2 F30

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

TEM, Transmission Electron Microscope

FEI Tecnai G2 F30

Chemical Composition, Impurities

EDS, EDX, Energy Dispersive X-ray Spectroscopy

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Electron Diffraction

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

GIXRD, Grazing Incidence X-Ray Diffraction

PANalytical Xpert PRO MRD X-ray Diffractometer

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo Scientific K-Alpha

Bonding States

XPS, X-ray Photoelectron Spectroscopy

Thermo Scientific K-Alpha

Substrates

Nylon 6,6

Si(100)

Keywords

Sacrificial Template

Notes

Meaglow Ltd hollow cathode RF-plasma source was used.

BN film characterized as sequential CVD due to running considerably higher than the known thermal decomposition temperature for the TEB.

305

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

Follow plasma-ald.com

Follow @PlasmaALDGuy Tweet

Shortcuts



© 2014-2017 plasma-ald.com